AFSEM: In-situ AFM in a SEM

a) The AFSEM scanner; b) AFSEM in a FEI Quanta 200 3D; c) Topography of a scratch in Rh (111)
The AFSEM is an add-on at the field emission SEM or dual-beam FIB @USTEM TU Wien and allows topographic characterization correlated with imaging and chemical analysis without removing the sample from the SEM. The maximum size to be investigated in one single measurement is 30 x 30 µm2. The AFSEM allows AFM investigations unter high vacuum conditions.


  • GETec Microscopy AFSEM with low-noise self-sensing cantilevers
  • Available at the FEI Quanta 250 FEG field emission SEM and at the FEI Quanta 200
  • 3D dual beam FIB




further information ...


  • Any kind of materials, where topological information has to be combined with SEM imaging and/or chemical characterization by EDX